300mm Wafer handling system.

Scope: Semiconductors industry.

Main features:

• 300 [mm] wafer sizes.
• Repeatability of ±1µ.
• Robust design, self frequency of 250[Hz].
• Additional station for post measurement wafer.
• Capable to handle wafers in arbitrary orientation up to 3 [mm] of de-center.
• Wafer centering within 0.2 [mm] and 1 [mrad] for orientation.
• Compliance with clean-room class 10 standard.